PURPOSE: To provide an improved type tactile sensor array of high space resolution which can be easily manufactured at a large scale, by providing a substrate which comprises the first surface and an electronic integrated circuit formed on the first surface. CONSTITUTION: A thin film of a conductive material such as metal is provided in an area of a substrate 11 constructed of a dielectric material, thus a plate 10 for a capacitor is formed. On the surface of the substrate 11, a large scale electronic circuit 12 is formed. The shape of the area on the plate 10 is rectangular, and, when required, coated with a thin dielectric body 13. A deformable thin conductive film 14 is provided, with a gap (h), above the substrate 11, and since the film 14 is deformable, it is displaced or bent in the direction of the substrate 11 according to a pressure from above and a capacity increases locally due to the deformation. In order to measure changes in capacity, for, for example, each capacitive sensor on an array, the plate physically held on the substrate 11 is kept always at an earth voltage.
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