Safety management system of ion implantation device

摘要

(57) Abstract Objective Safety of the human body and conservation of the device automatic inside the device columnu. Constitution Safety, taking of the signal which relates to device conservation with display andTransmission of control signal to each unit inside bi device. Advantages After the detection signal inputting, at once automatic safety, conservation motionBecause the work is done, you can measure the safety of the human body and the conservation of the device.