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CURVED SURFACE GALVANOMIRROR SCANNER

机译:弯曲表面电镜扫描仪

摘要

PURPOSE:To miniaturize the exposure device, and also, to fix the light source onto an oscillation axis. CONSTITUTION:A laser beam scanning part 13 is constituted of a curved surface mirror 13a, and a curved surface mirror driving part 13b for rotating or oscillating the curved surface mirror centering around an axis AX for passing through a focus of the curved surface mirror 13a, and also, the curved surface mirror driving part 13b is constituted of a piezoelectric element 13c, and an elastic body 13d for transferring the vibration of the piezoelectric element to the curved surface mirror by resonance the piezoelectric element 13c is vibrated by a piezoelectric element driving circuit 14, and by utilizing the resonance of the elastic body 13d, the vibration is amplified and transferred to the curved surface mirror 13a, and a laser beam which is made incident from the axis AX direction is deflected by the curved surface mirror 13a and a photosensitive body 11 is scanned.
机译:目的:将曝光设备小型化,并将光源固定在振荡轴上。组成:激光束扫描部分13由曲面反射镜13a和曲面反射镜驱动部分13b组成,曲面反射镜驱动部分13b用于使曲面反射镜以轴线AX为中心旋转或振荡,以穿过曲面反射镜13a的焦点,并且,曲面镜驱动部13b由压电元件13c构成,通过压电元件驱动电路使压电元件13c通过共振将压电元件的振动传递至曲面镜的弹性体13d振动。如图14所示,通过利用弹性体13d的共振,振动被放大并传递到曲面镜13a,并且从轴向AX方向入射的激光束被曲面镜13a和感光体偏转。主体11被扫描。

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