FORMATION OF THIN OXIDE SUPERCONDUCTING FILM HAVING DIFFERENT ORIENTATION PROPERTIES AT DIFFERENT PARTS

摘要

PURPOSE:To obtain an oxide superconducting thin film having a-axis-oriented and c-axis-oriented parts and excellent in continuity at the interface by forming a thin c-axis-oriented oxide superconducting film on the entire masked substrate and forming a thin a-axis-oriented film on the seed thin film. CONSTITUTION:A coating material (e.g. CaO, Zr) capable of being peeled without damaging a thin oxide superconducting film or the thin formed film surface of the substrate is prepared. The specified part of a substrate 5 is coated with the material to form a coating layer 6. A thin a-axis-oriented Y1Ba2Cu3O7-x oxide superconducting film or a seed thin film 3 consisting of a crystal structure similar to the former is formed thereon. The coating layer 6 is peeled, a thin Y1Ba2Cu3O7-x oxide superconducting film is formed on the entire surface, and a thin c-axis-oriented oxide superconducting film 1 is formed on the exposed surface 5. A thin a-axis-oriented Y1Ba2Cu3O7-x oxide superconducting film 2 is formed on the seed thin film 3.