LINEAR MOTOR AND XY DRIVE TABLE EMPLOYING LINEAR MOTOR

摘要

PURPOSE: To cool heated parts of a linear motor efficiently while eliminating vibration source such as cooling jacket. ;CONSTITUTION: Stator of a DC linear motor holds electromagnetic coils 4A-4F arranged in series in the longitudinal direction wherein respective electromagnetic coils 4A-4F are heating ends of heat pipes and parts of lead wires 4AL-4FL of the electromagnetic coils 4A-4F penetrate through heat-exchangers 10A-10F, respectively, and serve as the cooling ends of heat pipe to liquefy refrigerant in the heat pipes which is gasified by the heat of the electromagnetic coils 4A-4F. Lead wires 4AL-4FL are connected, respectively, through power amplifiers 11A-11F with a control circuit 12 for controlling the currents flowing through the electromagnetic coils 4A-4F.;COPYRIGHT: (C)1993,JPO&Japio