METHOD FOR CONTROLLING FURNACE ATMOSPHERE IN HEAT TREATMENT FURNACE

摘要

PURPOSE:To improve the accuracy and the stability of atmospheric control in a furnace by reducing influence on the furnace atmosphere control in the other zone at the time of changing gas flow rate in some zone. CONSTITUTION:At the time of controlling the furnace atmosphere, a first zone furnace atmospheric control part 30a for controlling dew point in the furnace atmosphere in the first zone 2a uses a second zone wet gas control valve command value MV2w and a second zone dry gas control valve command value MV2d from a second furnace atmospheric part 30b, as well. The second zone furnace atmospheric control part 30b for controlling the dew point in the furnace atmosphere, as well, uses a first zone wet gas control valve command value MV1w and a first zone gas control valve command valve MV1d from the first zone furnace atmospheric control part 30a, as well. At the time of obtaining flow control valve opening degree, by adding the influence of the flow control valve opening degree control in the other zone, the control accuracy and stability can be improved.