BEAM POTENTIAL ADJUSTER STANDARD-GRID OF CHARGED PARTICLE BEAM ANALYZER, AND FORMATION OF GRID

摘要

PURPOSE:To provide a beam potential adjuster standard-grid or the like whereby analytic faculties inherent to a charged particle beam analyzer in itself can be sufficiently exhibited. CONSTITUTION:A beam potential adjuster standard-grid 1 illustraled in a figure is employed when the potential of a charged particle beam (ion beam) entered into a secondary ion mass spectrograph is adjusted before an impurity of aluminium contained in a high-purity silicon substrate (analysis-orientated sample) is analyzed using the secondary ion mass spectrograph. This beam potential adjuster standard-grid 1 is constructed in such a manner that high-purity silicon herein as a structure-material of the grid other than aluminium is used and then grid-like grooves 11 is formed directly in the surface of the silicon 4 substrate. When a charged particle beam is applied to the beam potential adjuster standard-grid 1 at the time of adjusting the potential of a beam entered into the secondary ion mass spectrograph, the constituent element of the beam potential adjuster standard-grid 1 sputtered out from the grid may be floated and stuck in the secondary ion mass spectrograph, however, the constituent element floated and stuck is not aluminium so that there may be prevented from a great influence of this constituent element upon an analysis made in the secondary ion mass spectrograph.