PRODUCTION OF OXIDE SUPERCONDUCTOR BY METHOD FOR LASER VACUUM DEPOSITION AND APPARATUS FOR LASER VACUUM DEPOSITION

摘要

PURPOSE:To enable homogenization of the amount of fine particles scattering from a target in the left and right directions of light and form a homogeneous semiconductor film because the light diameter cross section of a laser beam can be regulated in a symmetrical shape such as a square or a circle. CONSTITUTION:An oxide superconductor is produced by a method for laser vacuum deposition. In the process, a light diameter controlling means 8 for diaphragming the light diameter cross-sectional area of a laser beam 2 emitted from a laser beam source 3 to 0.5-2cm2 is installed between an emitting end of the laser beam source 3 and a concentrating means 4 for concentrating the laser beam 2 and irradiating the surface of a target 1 and the resultant laser beam 10 with the diaphragmed light diameter after passing through the light diameter controlling means 8 is concentrated with the light concentrating means 4 to irradiate the surface of the target 1.