NONCONTACT METHOD AND INSTRUMENT FOR MEASURING DISPLACEMENT AND NONCONTACT FILM THICKNESS MEASURING INSTRUMENT

摘要

PURPOSE: To obtain a noncontact displacement measuring method by which the displacement of an object can be accurately measured even when the object is a light scattering body, accurate noncontact displacement measuring instrument, and noncontact film thickness measuring instrument which can measure the film thickness of a light reflecting body on the light scattering body, that of a light scattering body on the light reflecting body, or the dried film thickness of a wet film in a wet state. ;CONSTITUTION: The conventional noncontact displacement measuring head 10 measures the displacement of an object 20 to be measured by exciting a laser element by means of a drive circuit in the head 10, irradiating the object 20 on the outside of the measuring instrument with a laser beam 12 through an optical system, converting the light receiving position of a position sensor into the displacement of the object 20 by means of a signal processing circuit after receiving and amplifying the reflected light of the beam 12 with the position sensor, and displaying the found displacement on a displaying section, but, in this invention, a memory circuit and correction calculating circuit are added to the conventional head 10 so that the displacement of the object 20 found by the signal processing circuit can be corrected.;COPYRIGHT: (C)1993,JPO&Japio