CANTILEVER-TYPE ACTUATOR, AND SCANNING TUNNELING ELECTRON MICROSCOPE AND INFORMATION PROCESSING DEVICE USING THE SAME

摘要

PURPOSE: To achieve a flexed displacement of a cantilever portion 2 without any elastic body of different substances by allowing a piezoelectric body of a same substance to be two layers with different electrical resistivity in a direction of film thickness. ;CONSTITUTION: A lower electrode 2 is formed on a substrate 1 and ZnO thin film as a piezoelectric body is used on it. An electrical resistivity is changed due to application of voltage and the electrical resistivity can be changed greatly under growth conditions. Therefore, a low-resistance piezoelectric body 3a and a high-resistance piezoelectric body 3b are constituted in film-thickness direction of the ZnO thin film. An upper electrode 4 is formed on it, thus enabling an unneeded portion to be eliminated. Further, the substrate 1 is etched and a cantilever portion 6 can be formed. In this manner, by changing electrical characteristics of the piezoelectric material Zn thin film in film thickness direction, a portion where deformation is large and a portion where deformation is small in thickness direction of the piezoelectric body are generated, thus enabling a flexed displacement to be generated at a cantilever portion 6 even if there are no elastic bodies due to different substances.;COPYRIGHT: (C)1993,JPO&Japio