PRODUCTION OF HIGH-QUALITY OXIDE SUPERCONDUCTOR THIN FILM

摘要

PURPOSE:To stably produce a high quality oxide superconductor thin film by heating the raw material powder of the superconductor thin film under a high vacuum below a temperature at which the oxide superconductor constituting the thin film takes in oxygen. CONSTITUTION:In a method for producing an oxide superconductor thin film from a powdery raw material oxide, the raw material oxide powder is subjected to heat treatment under a high vacuum at a temperature which is lower than the temperature at which the oxide superconductor constituting the thin film takes in oxygen by =100 deg.C, and subsequently formed into the thin film. The method is performed under a high vacuum free from a residual substance which reacts into a pollutant, and prevents the generation of new pollution caused by a residual gas in the vacuum which reacts with the raw material oxide into a pollutant. Heating must be carried out under a vacuum of =1X10-9, because heating under a higher pressure will generate new pollution.