PURPOSE:To make each amount of levitation and inclination controllable by installing both magnetic horizontal and vertical forcers, a stage position measuring means and a gap sensor in a state which has magnetically levitated a magnet through a base stage set up in both X and Y directions, in a precision one-step and six-degree-of-freedom stage for a semiconductor exposer or the like. CONSTITUTION:Respective magnets 2X, 2Y are set up on a stage base 1 at an equi-interval and N, S alternately in both X and Y direction, respectively. In addition, a stage 3 is magnetically levitated and supported shiftably in these X and Y directions. Then, three magnetic forcers 4a-4c are locked to this stage 3. These magnetic frocers 4a-4c are composed of each of horizontal and vertical forcers. Moreover, a laser length measuring instrument 5 and a gap sensor 7 are set up in this stage 3, through which each position in X, Y and thetadirections of the stage 3 and a gap between the stage 3 and the base stage 1 are all measured. Thus, dust is preventable from flying up.
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