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METHOD OF FINE PHOTOETCHING WORK FOR METALLIC MATERIAL AND METALLIC MATERIAL FOR FINE PHOTOETCHING WORK

机译:金属材料的精细光蚀刻加工的方法和金属材料的精细光蚀刻加工的方法

摘要

PURPOSE:To carry out fine photoetching work minimal in the amount of side etching by etching a metallic material prepared by joining a layer of an alloy having an Ni content larger than that in an undermentioned alloy to a layer of soft steel or Fe-Ni alloy by using an aqueous solution of FeCl3. CONSTITUTION:A layer of an alloy containing Fe and Ni by =30% and also containing Ni by the amount larger by =20% than the amount of Ni contained in an undermentioned primary alloy layer or a layer of a secondary alloy composed principally of Ni is joined by one or more layers to one side or both sides of a layer of soft steel or primary alloy containing Fe and Ni by =50%. At this time, stainless steel can be used for the secondary alloy layer. Further, the above joining is carried out by means of cladding, such as explosion bonding, pressure welding, and diffusion joining, thermal spraying, vapor deposition plating, etc. The resulting metallic material composed of multilayered joined material is subjected to photoetching work by using an aqueous solution of FeCl3 as an etchant. At this time, corrosion protective effect can be produced by the galvanic action of the joined dissimilar metals. By this method, the amount of side etching can be reduced, and fine photoetching work can be performed.
机译:目的:通过蚀刻将Ni含量比后述合金中的Ni含量大的合金层连接到软钢或Fe-Ni合金层上而制得的金属材料,以最少的侧面蚀刻量进行精细的光蚀刻工作通过使用FeCl 3的水溶液。组成:一层含有Fe和Ni的合金层,其含量大于等于30%,并且其Ni含量比下文所述的一次合金层或主要组成的二次合金层中所含的Ni量大出≥20% Ni的一层或多层通过一层或多层连接到含有≤50%的Fe和Ni的软钢或一次合金层的一侧或两侧。此时,不锈钢可用于第二合金层。此外,上述接合通过诸如爆炸接合,压力焊接和扩散接合的覆层来进行,热喷涂,气相沉积镀覆等。通过使用以下方法对所得的由多层接合材料构成的金属材料进行光蚀刻处理。 FeCl3水溶液作为蚀刻剂。此时,可以通过结合的异种金属的电作用产生腐蚀保护作用。通过这种方法,可以减少侧面蚀刻的量,并且可以执行精细的光蚀刻工作。

著录项

  • 公开/公告号JPH0477075B2

    专利类型

  • 公开/公告日1992-12-07

    原文格式PDF

  • 申请/专利权人 NIPPON METAL IND;

    申请/专利号JP19890216088

  • 申请日1989-08-24

  • 分类号C23F1/00;C23F1/02;H01J9/14;H01L23/50;

  • 国家 JP

  • 入库时间 2022-08-22 05:12:45

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