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Method of producing CVD diamond film substantially free of thermal stress-induced cracks
Method of producing CVD diamond film substantially free of thermal stress-induced cracks
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机译:制备基本上没有热应力引起的裂纹的CVD金刚石膜的方法
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摘要
In a chemical vapor deposition method for producing a diamond film substantially free of thermal stress-induced cracks, diamond growth occurs on both sides of a thin substrate so that two diamond coatings with identical opposing tensile forces are formed on each side of the substrate at a thickness greater than the thickness of the substrate.
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