METHOD FOR MANUFACTURING SUPERCONDUCTING DEVICE HAVING A SUPERCONDUCTING LAYER FORMED OF AN OXIDE SUPERCONDUCTOR AND A NONSUPERCONDUCTING LAYER FORMED ON THE SUPERCONDUCTING LAYER

摘要

For manufacturing a superconducting device, a ?-axis orientated oxide superconductor layer is formed on a surface of the substrate and at least one layer which is not composed of an oxide superconductor is formed on the ?-axis orientated oxide superconductor layer. The ?-axis orientated oxide superconductor layer is etched so that at least one side surface of the ?-axis orientated oxide superconductor layer exposed. Then, the substrate is heated in an O2 atmosphere, an O2 atmosphere including O3 or an O3 atmosphere, so that oxygen penetrates into the ?-axis orientated oxide superconductor layer from the exposed side surface. An .alpha.-axis orientated oxide superconductor thin film is formed so as to cover the exposed side surface of the ?-axis orientated oxide superconductor layer.