Method for manufacturing superconducting device having a superconducting layer formed of an oxide superconductor and a nonsuperconducting layer formed on the superconducting layer

摘要

For manufacturing a superconducting device, a c-axis orientated oxide superconductor layer is formed on a surface of the substrate and at least one layer which is not composed of an oxide superconductor is formed on the c-axis orientated oxide superconductor layer. The c-axis orientated oxide superconductor layer is etched so that at least one side surface of the c-axis orientated oxide superconductor layer exposed. Then, the substrate is heated in an O₂ atmosphere, an O₂ atmosphere including O₃ or an O₃ atmosphere, so that oxygen penetrates into the c-axis orientated oxide superconductor layer from the exposed side surface. An a-axis orientated oxide superconductor thin film is formed so as to cover the exposed side surface of the c-axis orientated oxide superconductor layer.