A process for the vapor phase synthesis of diamond and highly crystalline diamond

摘要

High quality diamond excellent in crystalline property as well as transparency, can be synthesized at a high growth speed by a process which comprises using, as a raw material gas, a mixed gas of hydrogen gas A, an inert gas B, a carbon atom-containing gas C and an oxygen atom-containing inorganic gas D in such a proportion as satisfying the following relationship by mole ratio: 0.001 /= B/(A+B+C+D) /= 0.95 0.001 /= C/(A+B+C+D) /= 0.1 0.0005 /= D/C /= 10 except where a same gas is chosen from the carbon atom-containing gas C and the oxygen atom-containing inorganic gas D, feeding the mixed gas into a reactor in which plasma is then formed by applying a DC or AC electric field at a pressure of 10 to 760 torr and thereby depositing and forming diamond on a substrate arranged in the reactor.