QUARTZ INTEGRATED TROUGH/SUMP RECIRCULATING FILTERED HIGH-PURITY CHEMICAL BATH

摘要

a combination of the chemical bath includes a treating tank for recycling (11) of quartz, and a tank chamber disposed directly adjacent to the process tank.a tank (54) extends in the vicinity of the upper part of the outer walls of the treatment tank, tank (54) is tilted so as to cause a gravitational flow into the chamber of the tank (21).the chamber (21) includes a tank connection (27) located on the bottom of the chamber (21), which leads the liquid of the tank circuit to a pump / filter, whose output is supplied to the bottom of the processing tank (11).this causes the liquid to overflow from the processing tank (11), to flow in the tank (54) and to flow into the chamber adjacent the tank (21). a plurality of heating units (19) is mounted on the outer surface of the processing tank (11) to heat the fluid in the processing temperature is adequate.the tank chamber (21) is cooled so that the fluid entering the pump / filter is the coldest temperature cycle for liquid flow. the process tank (11) and the tank chamber (21) can be carried out in a room, molded and fused quartz plates, and arranged inside the outer shell, a thermal insulation.