X-ray mask structure, preparation thereof and X-ray exposure method

摘要

An X-ray mask structure comprises an X-ray transmissive film, an X-ray absorptive member held on the X-ray transmissive film and supporting frame for supporting the X-ray transmissive film. The X-ray absorptive member is constituted of crystalline grains having a grain boundary size of 1µm or larger, or has a density of 90% or more relative to the density of the bulk material.