amorphous semiconductor and amorphous silicon photovoltaic device.

摘要

An amorphous silicon semiconductor of the general formula: a-Si(l-x-y)CxNy containing hydrogen and/or fluorine, which provides an amorphous silicon PIN junction photovoltaic device having an improved conversion efficiency when it is used as a P-type or N-type semiconductor (10) in the layer on the light impinging side of the PIN junction photovoltaic device. Also, the conversion efficiency of an amorphous silicon PIN junction photovoltaic device is improved by using a film of ITO and SnO2 two layer structure as a transparent electrode (11) for the photovoltaic device with the SnO2 layer contacting the P or N layer (10), and the improvement is particularly marked in the heterojunction photovoltaic device.