Cylindrical lens focussing optical system for structured exposure - is formed of quartz glass plano-convex elements with juxtaposed edges in path of laser beam

摘要

A number of rhombic cylindrical lenses is arranged in a rectangular pattern with their plane surfaces on a quartz glass plate, and their convex surfaces pointing in the direction of the radiation from an excimer laser (1). The refraction produces a pattern of squares bounded by bars or stripes interrupted by bridges at the corners, on a metallised film (3) wound (6) through the refracted beam while the output from the laser is controlled (10). USE/ADVANTAGE - Pref. in pulsed laser beam texturing of vapour-deposited alloys on polymer films, rapid and accurate results are obtained. with comparatively low radiation losses.