Micro-mechanical electrostatic relay with parallel electrodes - has frame shaped armature substrate with armature contacts above base electrode contacts on base substrate

摘要

On a base substrate (1) a base electrode (11) has two sections with contact strips (11a), and two other contact strips (12a) alternating with them. On a frame shaped armature substrate (2) an armature (21) is connected at its edges by narrow resilient supporting strips (22). At the centre a similarly resiliently supported armature contact piece (24) is supported above the base contacts. The whole forms a symmetrical arrangement and, when a voltage is applied across the armature and base electrodes, the armature is attracted towards the base electrode in a movement at right angles to its surface. ADVANTAGE - High contact force.