Excimer laser with gas reservoir - has collection receptacle connected to gas reservoir and halogen source over lines having shut-off valves

摘要

The excimer laser includes a gas reservoir in which a gas discharge is implemented under participation of halogen gas. A collection receptacle (11) is connected over lines with shut-off valves (V1, V2) to both a gas reservoir and a halogen source (13). The collection receptacle, is provided with a pressure measuring port. The collection receptacle may also be connected via a shut-off device to an evacuating apparatus. ADVANTAGE - Gas reservoir can be re-filled or topped-up with halogen gas where eg pressure of halogen gas source is low and/or is in small volumes.