System for inserting substrates into clean dreams

摘要

A system for transferring substrates in a clean room (100) has a box (1) for receiving a cassette (101) that contains the substrates (102), and a bottom (2) that hermetically closes the box (1) and that can be locked and unlocked in the box (1) by a locking mechanism. The locking mechanism has a captive C-washer (25) rotatively mounted in the box bottom (2). The captive C-washer (25) drives locking elements (21a, 21b; 321a, 321b), preferably by means of connecting rods (24a, 24b; 324a, 324b). The locking elements (21a, 21b; 321a, 321b) engage locking slots (11a, 11b) of the box (1). The captive C-washer (25) has catching bores (26a, 26b) engaged by the locking bolts (41a, 41b) of a rotary disk (45) arranged in a lock gate (4). A swivelling movement of the rotary disk (45) driven by a driving device of the system causes the bottom (2) to be locked and unlocked in the box (1). A reception frame (3) allows the box (1) to be accurately positioned and a blocking mechanism bloks the box (1) in the reception frame (3). The blocking mechanism is mechanically coupled to the rotary disk (45), so that when the bottom (2) is locked in the box (1) by a swivelling movement of the captive C-washer (25), the box (1) is unblocked in the frame (3), whereas when the bottom (2) is unlocked from the box (1) by a swivelling movement of the captive C-washer (45), the box (1) is blocked in the reception frame (3).