Temperature compensated micro flow sensor - has thermal column producing thermoelectric voltage with hot junctions on thin membrane evenly distributed w.r.t. heating resistance

摘要

The sensor contains at least one heating resistance (10) and at least one thermal column. The hot (4) and cold (5) junctions of the thermal column are arranged on a thin membrane (2) and thermally isolated from a carrier (1) acting as a heat sink. The hot junction are uniformly distributed w.r.t. the heating resistance. The entire thermal column thin film element is separated from the heating resistance by an electrical insulating film (9), which may be formed by a photoresist. ADVANTAGE - High resolution measurement of flow rates and speeds independently of temp. of flowing medium.