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process for removal of silanverbindungen from silanhaltigen fumes.
process for removal of silanverbindungen from silanhaltigen fumes.
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机译:烟熏烟气中去除烟熏烟熏的方法。
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摘要
A method for removing silane compounds from exhaust gases containing silanes comprises treating the silane containing gas with a metal alcholate in alcoholic solution to form a tetraalkoxysilane.
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