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A process for the doping of zinc - selenide - single crystal.

机译:硒化锌单晶的掺杂工艺。

摘要

A ZnSe single crystal which is obtainable by a method comprising steps of: placing a piece of a ZnSe polycrystal in a sealed reactor tube having an atmosphere of at least one gas selected from the group consisting of an inert gas, nitrogen and H2Se kept at pressure of from 0.1 Torr. to 100 Torr., moving the reactor tube containing the piece of ZnSe polycrystal through a low temperature first zone kept at a temperature of from room temperature to 100 DEG C, a temperature-raising second zone having a temperature gradient of from 50 DEG C/cm to 200 DEG C/cm, a high temperature third zone kept at a temperature of from 700 DEG C to 900 DEG C, a temperature-lowering fourth zone having a temperature gradient of from -200 DEG C/cm to -50 DEG C/cm and a low temperature fifth zone kept at a temperature of from room temperature to 100 DEG C in this order at a moving rate of from 0.05 mm/day to 5 mm/day while keeping the solid state of the ZnSe crystal whereby the ZnSe polycrystal is converted to a ZnSe single crystal, cutting the ZnSe single crystal to form a ZnSe single crystal chip or wafer, placing the ZnSe single crystal chip or wafer in a reactor containing, in case of doping an n-type impurity, zinc and the n-type impurity or a compound comprising the n-type impurity and zinc or, in case of doping a p-type impurity, selenium and the p-type impurity or a compound comprising the p-type impurity and selenium and heating the reactor at a temperature of 400 DEG C to 900 DEG C under pressure of 1 Torr. to 100 Torr. for at least 20 hours to diffuse the impurity atoms in the ZnSe single crystal.
机译:可以通过以下方法获得的ZnSe单晶,该方法包括以下步骤:将ZnSe多晶片放置在密封的反应器管中,该反应器管中的至少一种气体选自惰性气体,氮气和H2Se,并保持压力从0.1托起。到100托,将含有ZnSe多晶片的反应器管移动通过保持在室温至100℃的低温第一区,温度梯度为50℃/℃的第二升温区。厘米至200℃/ cm,高温第三区保持在700℃至900℃,温度降低的第四区的温度梯度为-200℃/ cm至-50℃。 / cm 2和一个低温第五区域,该区域以从0.05mm /天至5mm /天的移动速率依次保持在室温至100℃的温度下,同时保持ZnSe晶体的固态,由此ZnSe将多晶转变为ZnSe单晶,切割ZnSe单晶以形成ZnSe单晶芯片或晶片,然后将ZnSe单晶芯片或晶片放置在反应器中,该反应器包含(在掺杂n型杂质的情况下)锌和n型杂质或包含n型杂质的化合物锌,或者在掺杂p型杂质的情况下,硒和p型杂质或包含p型杂质和硒的化合物,并在400℃至900℃的温度下加热反应器。 1托。到100托至少20个小时才能使ZnSe单晶中的杂质原子扩散。

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