Silicon carbide field-effect transistor with improved breakdown voltage and low leakage current

摘要

A silicon carbide field-effect transistor is provided which includes a semiconductor substrate, a channel formation layer of silicon carbide formed above the substrate, source and drain regions provided in contact with the channel formation layer, a gate insulator disposed between the source and drain regions, and a gate electrode formed on the gate insulator, wherein a first contact between the channel formation layer and the drain region exhibits different electric characteristics from those of a second contact between the channel formation layer and the source region. Also provided is a method for producing such a silicon carbide field-effect transistor.