Diamond n-type semiconductor diamond p-n junction diode

摘要

A diamond n-type semiconductor including a substrate and a phosphorus element-doped diamond thin film disposed on the substrate. The diamond thin film is deposited by vaporizing a solution comprising a liquid organic compound as the diamond material with diphosphorus pentoxide (P. sub.2 O.sub.5) dissolved therein, and subjecting the resultant gas to a hot filament CVD method.