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Method of forming patterned oxide superconducting films and Josephson junction devices by using an aqueous alkaline solution
Method of forming patterned oxide superconducting films and Josephson junction devices by using an aqueous alkaline solution
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机译:通过使用碱性水溶液形成图案化的氧化物超导膜和约瑟夫森结器件的方法
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摘要
A method of forming a fine groove on a superconducting thin film. A superconducting oxide thin film is formed on a MgO substrate, and a damaged layer is formed thereon by irradiating the superconducting thin film with focused ion beams to such a degree that not sputter is generated and the crystalline structure of the superconducting thin film is disturbed. The damaged layer is then removed by treatment with a strong alkali such as KOH. Thus, a fine groove is effectively formed. By inserting an oxide layer between the substrate and the superconducting thin film, a Josephson junction device suitable for superconducting transistors is produced.
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