PURPOSE:To improve the accuracy of setting the electron beam irradiating position by operating an electrostatic prism system arrang-ed in the device from the outside of a box body of the device. CONSTITUTION:The setting of the electron beam irradiating position is carried out by moving an electrostatic prism system. Since the electrostatic prism system is furnished in a box body of a vacuum ambiance which composes the electron beam irradiating device, the work of setting the irradiating position is very complicated if the operation of the electrostatic prism system can be done only inside the box body. On the contrary, by moving the electrostatic prism system from the outside of the box body, the accuracy of the irradiation can be improved simply. The electrostatic prism system is operated by a movement mechanism 11 furnished outside the box body. The movement mechanism 11 can move the electrostatic prism system in the desired direction through moving rods 12 and 13 which are vacuum-separated by bellows 14, and a gyroscopic holding rack.
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