Vibration-proof support structure and vibration-proof component of small-sized precise equipment

摘要

(57) Abstract Objective Installation Characteristic vibration-proof support structure of satisfactory small-sized precise equipmentIt designates that it offers as purpose. Constitution Outer fitting it is done in tubed elastic body 24 and elastic body 24,At the same time the barrel 26 which has the flange 32 which projects to axial perpendicular directionWith, in elastic body 24 inner fitting the vibration-proof section which possesses with the axis 28 which is doneMaterial 22 in axis 28 in small-sized precise equipment 12 installationWith ru, barrel 26 attaching hole 30 of fixed frame 18At the same time Inlaying ball included flange 32 small-sized spirit of fixed frame 18In a state where this it touches to the surface of dense equipment side, vibration-proof component 22 thoseFixed frame the mediating/helping equipment it does with 18 and small-sized precise equipment 12ru.