MEMBRANE TYPE GASEOUS NITROGEN GENERATOR AND METHOD FOR SUPPLYING GASEOUS NITROGEN

摘要

PURPOSE: To respond with a change in the customers' demand patterns without entailing a cost increase of equipment and operation by mixing N₂ from a high-purity gaseous nitrogen (N₂) supply source and a low-purity N₂ supply source, such as membrane type N₂ generator, to a desired purity. ;CONSTITUTION: The first supply source which supplies the N₂ of the purity higher than the desired purity P₀ and the second supply source (membrane type N₂ generator) for supplying the N₂ of the purity lower than P₀ at the max. flow rate and higher than P₀ at a lower flow rate are disposed. The N₂ purity P from the second supply source is measured and when PP₀, the N₂ from both supply sources are mixed and the N₂ of the purity higher than P₀ is supplied to the customer. In the case of PP₀, the flow rate of the N₂ is regulated at need by supplying of the N₂ to the customer directly from the second supply source or the like.;COPYRIGHT: (C)1994,JPO