Method for recovering high-purity argon from exhaust gas from a single crystal manufacturing furnace

摘要

PURPOSE:To efficiently obtain high-purity Ar by removing a solid content such as dust and an oil content from the titled exhaust gas contg. Ar as an essential component and thereafter converting O2 into water and converting CO and H2 into CO2 and water respectively by means of catalytic reaction, adsorbing and removing these. CONSTITUTION:A solid content such as dust and an oil content are firstly removed from gas contg. Ar as an essential component, dust, the oil content, CO, O2, H2 and N2, etc., discharged from a single crystal producing furnace. Then H2 more in excess than stoichiometrical amount necessary or oxyhydrogen reaction is fed to the remaining exhaust gas and O2 contained in exhaust gas is converted into water in the presence of a catalyst such as Pd and Pt. Then after heating exhaust gas removed from O2 content, it is brought into contact with copper oxide to convert H2 and CO contained in the treated gas into water and CO2. Thereafter the above-mentioned treated gas contg. Ar as an essential component, water, CO2 and N2 is passed through an adsorption tower and brought into contact with an adsorbent such as zeolite to adsorb and remove water, CO2 and N2, and Ar having high-purity e.g. 99.9% is recovered.