METHOD FOR WORKING MEMBER

摘要

PURPOSE: To precisely and easily work even a member of a complicated shape at a high speed by irradiating the member on the move with ion beams of gas contg. oxygen, halogen, elements, etc. ;CONSTITUTION: In a vacuum chamber evacuated by an evacuating apparatus 7, the position of a member to be worked 4 fitted to a moving stage 6 is measured and determined based on a SIM image obtained by using convergent ion beams 2 of Ga from an ion gun 1. Next, while moving the moving stage 6, the member to be worked 4 is irradiated with uniform ion beams 3 from a Kaufman type uniform ion source 5. At this time, the ion beams 3 use one of oxygen contg. gas, such as NO₂, halogen element contg. gas, such as HCl and heavy element contg. gas, such as WF₆ or their mixed gas and are parallel and of uniform density and strength. In place of the uniform ion beams 3, convergent ion beams 2 from the ion gun 1 may be irradiated.;COPYRIGHT: (C)1994,JPO