ULTRAHIGH PURITY WATER PREPARATION APPARATUS WITH ELECTRIC REGENERATION-TYPE ION EXCHANGE DEVICE

摘要

PURPOSE: To provide a ultrahigh purity water preparation apparatus which can prolong the life of an ion exchange resin, curtail running cost and minimize the generation of waste. ;CONSTITUTION: This superhigh purity water preparation apparatus is to receive superhigh purity water and purifies it to a level of ultrahigh purity water. The apparatus consists of (a) a gas permeatable membrane 2 with a means which conducts part 11 of superhigh purity water to a liquid contact side and supplies hydrogen 12 to a gas contact side, (b) an ultraviolet radiation device 3 which treats both the residual part 1 of superhigh purity water and the treated water (a), (c) a hydrogen deaeration membrane 4 which deaerates the treated water of (b), (d) an electric regeneration-type ion exchange device 5 which carries out desalting of the treated water of (c), (e) an ion exchange resin device 6 which further treats the treated water of (d), and (f) and ultrafiltration device 7 which ultrafilters the treated water of (e). In addition, the devices of (a) to (f) are connected sequentially to each other using piping.;COPYRIGHT: (C)1994,JPO&Japio