EVALUATION OF PARTICLE CONTAMINATION REMOVAL EFFECT OF SOLID SURFACE BY CLEANING

摘要

PURPOSE: To effectively evaluate a particle contamination removal effect due to cleaning of the solid surface by evaluating a degree of a contamination state and its removal by observation of the solid surface before and after cleaning with an electron microscope. ;CONSTITUTION: The solid surface 17 having the fine structure 16 is dipped into a solution 13 where fine particles 15 are dispersed. Thereby, particles are absorbed and piled up inside the fine structure 16 of the solid surface 17 for causing particle contamination. When cleaning performed to the solid surface 17 having the fine structure 16 forced-contaminated in this way, the particles inside the fine structure 16 are removed according to a contamination degree and a cleaning method. The particle contamination state and the effect of the particle contamination removal by cleaning can be evaluated by observing the solid surface 17 before and after cleaning by an electron microscope. When contamination takes place under reduced pressure, penetration of a solution 13 inside the fine structure 16 of the solid surface is facilitated so as to cause adsorption and piling up of a large quantity of particles inside the fine structure of the solid surface.;COPYRIGHT: (C)1994,JPO&Japio