MANUFACTURE OF POLYIMIDE THIN FILM, LIQUID CRYSTAL MOLECULAR ORIENTATION FILM UTILIZING IT AND MANUFACTURE OF LIQUID CRYSTAL DISPLAY DEVICE

摘要

PURPOSE: To enable a high-quality polyimide thin film to be formed at a low temperature, and to enable the film to be used for an insulating film, liquid crystal orientation film or the like, and also to enhance quality by applying this film to a liquid crystal display device by vapor-depositing and polymerizing diisocyanate and a tetracarbonic acid derivative on a base plate in a vacuum. ;CONSTITUTION: A polyimide thin film is formed by vapor-depositing and polimerizing diisocyanate and a tetracarbonic acid derivative under vacuum, In other words, first, a monomer 3 and a monomer 4 are put on evaporating dishes 1 and 2 respectively, and the pressure in a vapor-deposition vessel 12 is reduced by a vacuum pump 13 to e.g. 10^-5 Torr or so. Then, the evaporating dishes 1, 2 are heated by means of evaporating source heaters 5 and 6. After the temperature of monomer has reached a set temperature, a shutter 7 is opened for starting vapor deposition. As a base plate 9, such a base plate that is weak in heat can ice used, so glass base plate or the like may be used. In this way, a polyimide thin film is formed on the base plate.;COPYRIGHT: (C)1994,JPO&Japio