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Method of manufacturing a polyimide thin film manufacturing method of the liquid crystal molecular alignment film and a liquid crystal display device using it
Method of manufacturing a polyimide thin film manufacturing method of the liquid crystal molecular alignment film and a liquid crystal display device using it
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机译:液晶分子取向膜的聚酰亚胺薄膜的制造方法及使用其的液晶显示装置
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摘要
PURPOSE: To enable a high-quality polyimide thin film to be formed at a low temperature, and to enable the film to be used for an insulating film, liquid crystal orientation film or the like, and also to enhance quality by applying this film to a liquid crystal display device by vapor-depositing and polymerizing diisocyanate and a tetracarbonic acid derivative on a base plate in a vacuum. ;CONSTITUTION: A polyimide thin film is formed by vapor-depositing and polimerizing diisocyanate and a tetracarbonic acid derivative under vacuum, In other words, first, a monomer 3 and a monomer 4 are put on evaporating dishes 1 and 2 respectively, and the pressure in a vapor-deposition vessel 12 is reduced by a vacuum pump 13 to e.g. 10-5 Torr or so. Then, the evaporating dishes 1, 2 are heated by means of evaporating source heaters 5 and 6. After the temperature of monomer has reached a set temperature, a shutter 7 is opened for starting vapor deposition. As a base plate 9, such a base plate that is weak in heat can ice used, so glass base plate or the like may be used. In this way, a polyimide thin film is formed on the base plate.;COPYRIGHT: (C)1994,JPO&Japio
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