RHEED IMAGE OBSERVING METHOD USING SCANNING TYPE RHEED MICROSCOPE DEVICE

摘要

PURPOSE: To obtain a RHEED image observing method using a scanning type RHEED microscope device, which can accurately follow the movement of a part, of which intensity is to be measured by scanning of the electron beam, to measure a change of the intensity and which can obtain a clear RHEED image in a range from a low magnification to a high magnification. ;CONSTITUTION: The surface of a sample 23 is irradiated with electron beam, and a diffraction pattern projected on a fluorescent screen 24 is photographed by a TV camera 25 outside of a vacuum vessel 21, and a part, of which intensity is to be measured, is designated among the diffraction pattern of this photographed image. Next, the surface of the sample is scanned by electron beam, and the movement of a position corresponding to the designated part, of which intensity is to be measured, on the fluorescent screen 24 in relative to the scanning position is stored by a computer 26. Next, the surface of the sample is scanned by electron beam again, and a part, of which intensity is to be measured, among the diffraction pattern to be moved in response to the scanning position of the electron beam projected on the fluorescent screen 24 is followed and photographed by a TV camera outside of a vacuum vessel, and the fluorescent intensity of a part, of which intensity is to be measured, to be moved with the scanning by the electron beam is measured accurately.;COPYRIGHT: (C)1994,JPO&Japio