HIGH EFFICIENCY OXYGEN ION NEUTRALIZER AND ANTIOXYGEN ATOMIC PROPERTY EVALUATION DEVICE USING THE NEUTRALIZER

摘要

PURPOSE: To suppress the flowing amount of a reaction generating ion or an oxygen gas from a neutralization chamber by surrounding the neutralization chamber by a differential exhaust chamber, and giving a specific relation between the condactances and the effective exhaust speeds of the input and output orifices of the neutralization chamber and the differential exhaust chamber. ;CONSTITUTION: By a vacuum exhaust device connected to a differential exhaust chamber 65, an oxygen gas is led in a neutralization equipment 6 through a gas leading-in pape 63. The gas flows out passing through the orifices 61 and 62 of the neutralization equipment 6, and almost all the gas is exhausted from the differential exhaust chamber 65 passing through a vacuum exhaust passage 64a. When the oxygen gas ion beams 8 are injected from the inlet side orifice 61 into the neutralization condactances of the input and output orifices of the neutralization by the charge exchange with the oxygen gas, and the atomic beams 9 are injected from the orifices 62 and 67. In this case, the condactances of the input and output orifices of the neutralization equipment 6 and the differential exhaust chamber are made as C₂, C₃, and C₁, C₄, respectively, and the effective exhaust speeds as S₁ and S₂, and a specific relation is given to the condactances and the speeds so as to satisfy the following formula: (C₁+C₄)*(C₂+ C₃)/(S₁*S₂)10^-2.;COPYRIGHT: (C)1994,JPO&Japio