PREPARATION OF HIGH-QUALITY OXIDE SUPERCONDUCTING THIN FILM AND SUPERCONDUCTION COUPLING

摘要

PURPOSE: To obtain an oxide superconducting thin film excellent in crystallinity, smoothness and superconductivity and a tunnel superconduction coupled structure with good reproducibility by combining an on-axis sputtering method with an off-axis sputtering method. ;CONSTITUTION: The device shown in figure is provided with a substrate holder 3, a heater 4, a substrate 5, targets 61 and 62 and sputtering cathodes 21 and 22 in a vacuum chamber 1. The film of an oxide superconductor excellent in superconductivity is laminated by the off-axis sputtering method (substrate 5 and target 61) on an oxide superconducting thin film which is formed by the on-axis sputtering method (substrate 5 and target 62) and is excellent in crystallinity and smoothness to obtain the superconducting thin film. An oxide superconducting thin film is separately formed in the order on-axis, off-axis, on-axis and off-axis sputterings to obtain a tunnel superconducting coupled structure constituted of vertically arranged with oxide superconducting thin films (off-axis this film) while holding an insulator thin film (on-axis thin film) therebetween.;COPYRIGHT: (C)1993,JPO&Japio