wafer airtight keeping unit and keeping facility thereof

摘要

A first aspect of the invention is to provide a wafer keeping facility comprising a wafer keeping box (10) composed of wafer keeping shelves (15, 16) having filters (20) at the rear portions thereof, a loading apparatus (70) having a vertically movable loading mechanism which is mounted thereon and travels along a rail disposed on a front passage before the wafer keeping shelves (15, 16), a fluid circulating device (23) for supplying inert gas to the rear portion of the wafer keeping shelves (15, 16) and generating flowing passage, which directs to the front passage through the filters (20), and exhaust outlets (30B, 31B), first and second path boxes (30, 31) provided at taking-in-and-out outlet of the wafer keeping box (10), a gas reservoir (40) for storing inert gas therein, a first gas supply pipe (41) having a first valve (51), the first gas supply pipe (41) extending from the gas reservoir (40) toward the first pass box (30), a second gas supply pipe (42) having a second valve (52), the second gas supply pipe (42) extending from the gas reservoir (40) toward the second pass box (31), and a fluid control device (50).