POSITIVE-WORKING PHOTORESISTS EMPLOYING A SELECTED MIXTURE OF ETHYL LACTATE AND ETHYL 3-ETHOXY PROPIONATE AS CASTING SOLVENT

摘要

A light-sensitive composition comprising an admixture of: (a) at least one alkali-soluble binder resin; (b) at least one photoactive compound; (c) a sufficient amount of a solvent mixture comprising ethyl lactate and ethyl 3-ethoxy propionate to dissolve (a) and (b); wherein the amount of said binder resin is from about 60% to 95% by weight, the amount of said photoactive compound is from about 5% to about 40% by weight, both based on the total solids content of said light-sensitive composition, and wherein the weight ratio of ethyl lactate to ethyl 3-epoxy propionate is from about 30:70 to 80:20.