Field emission type cold cathode manufacturing method, field emission type cold cathode using the same, and flat panel type image display apparatus

摘要

The object of the present invention is to provide a method of manufacturing a field emission type cold cathode capable of increasing the shape reproducibility and uniformity of emitters and controlling the distance between gate and emitters, do.;The thermal oxidation insulating layer 13 is formed on the first substrate 11 having the concave portion 12 which makes the bottom portion sharp. The emitter material layer 14 is formed on the thermal oxidation insulation layer 13 while filling the recess 12. The first substrate 11 and the second substrate composed of the structural substrate are bonded. The first substrate 11 is removed by etching to expose the thermal oxidation insulation layer 13 and to project the recess 18 corresponding to the emitter material filled in the recess. After the emitter electrode layer 19 is formed on the exposed thermal oxidation insulation layer 13, the thermal oxidation insulation layer 13 and part of the gate electrode layer 14 are removed so that the convex tip end 18a is exposed, (18).