Fabrication method of 3-band bandpass filter of YBCO / MGO / AU structure

摘要

The present invention relates to a high-frequency superconducting three-band bandpass filter (YBa-10GHz) for high frequency use (-10 GHz) developed using a high-temperature superconducting epilayer,₂Cu₃O_7-x/ MgO / Au structure). In order to minimize the deterioration of superconductivity due to the wet etching of the high-temperature superconducting thin film, the optimal circuit pattern is designed with simulated circuit before the circuit pattern of the device is manufactured. A filter circuit pattern is designed directly on a dielectric monocrystal MgO substrate (5) by a laser ablation aided mask-patterning process using a pulsed laser deposition (laser ablation) method. By examining the high-frequency characteristics of a high-frequency superconductor by measuring the high-frequency characteristics of the device using a high-frequency housing (microwave housing or jig), we have examined the performance of the high-Below the critical temperature of the high-temperature superconductor, high-frequency characteristics were far superior to those of metal thin-film devices.