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Vertical bridge-grown GaAs single crystal growth by rotation of ampoule

机译:通过安瓿旋转垂直生长的桥式GaAs单晶

摘要

The present invention relates to GaAs single crystal growth by vertical bridge only method by rotation of an ampule, and more particularly to single crystal growth of GaAs which improves single crystal crystallinity of GaAs by rotating a crucible and improves homogeneity in crystal.;It consists of a cylindrical quartz ampoule wrapping the circumference of the GaAs in a vertical direction, a rotating support for rotating the lower portion of the ampoule with a stepping motor, and an upper portion of the ampoule to prevent axial movement during rotation of the ampoule An inner ring and an outer ring are formed so that a plurality of springs are formed between the inner and outer rings.
机译:本发明涉及通过安瓿旋转通过仅垂直桥方法进行的GaAs单晶生长,更具体地涉及通过旋转坩埚来提高GaAs的单晶结晶度并改善晶体均匀性的GaAs单晶生长。圆柱形石英安瓿瓶,沿垂直方向包裹GaAs的周围;旋转支撑,用于通过步进电机旋转安瓿瓶的下部;以及安瓿瓶的上部,以防止安瓿瓶旋转期间的轴向移动形成有外圈,从而在内圈和外圈之间形成多个弹簧。

著录项

  • 公开/公告号KR940018489A

    专利类型

  • 公开/公告日1994-08-18

    原文格式PDF

  • 申请/专利权人 박원근;

    申请/专利号KR19930001170

  • 发明设计人 고한준;노용정;

    申请日1993-01-29

  • 分类号C30B11/00;

  • 国家 KR

  • 入库时间 2022-08-22 04:37:34

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