Oscillation method of ultrasonic vibrator in ultrasonic cleaning

摘要

The present invention relates to a method of oscillating an ultrasonic vibrator used for ultrasonic cleaning of a workpiece in a cleaning liquid, and it is possible to easily generate uniform cavitation in various places in a cleaning liquid by using an ultrasonic vibrator having a single natural frequency, Another object of the present invention is to provide an ultrasonic oscillator oscillation method capable of obtaining an appropriate cavitation distribution corresponding to the type of workpiece, cleaning purpose, and the like.;A method of oscillating an ultrasonic vibrator according to the present invention is a method of oscillating an ultrasonic vibrator having a single natural frequency to emit ultrasonic waves in a cleaning liquid, the method comprising the steps of: generating a plurality of kinds of oscillations A second step of generating a composite signal in which the plurality of kinds of oscillation signals are mixed in a time series by outputting the plurality of kinds of oscillation signals by switching for a predetermined time, And a third step of causing the ultrasonic vibrator to oscillate using the signal for driving the ultrasonic vibrator.