Arc vaporising apparatus - with movable magnetic coil below target to adjust magnetic field and ensure uniform target vaporisation

摘要

Arc vaporising appts. in which a magnetic oild (6) is arranged below the target (4) outside an anodically connected housing (2). Means are provided for adjusting the external magnetic filed to the magnetic field of the arc current. The field strength is adjusted to a value which does not exceed 0.001 T. The current source is joined to the targe through the magnetic coil which can be moved by a motor perpendicular to the plane of the target. ADVANTAGE - A high target yield is achieved without forming large amounts of droplets in the vapour cloud.