Method and apparatus for testing of probe cards for the testing of integrated circuits

摘要

erfindungsgemu00e4u00df is an examination of the kontaktnadeln aligned probe cards is proposed, and the integrated circuit contacts are brought into contact to examine them, and by means of a camera 6, at least one print (a) to a kontaktnadel a contact area is recorded and an image of the imprint of a - i a auswerteinrichtung 7 is supplied.on the one hand, the image with stored patterns are compared and a qualitative evaluation of the nadelabdru00fccke a - i and returns, on the other hand, the optimal theoretical adjustment from the deviation of the nadelabdrucks of the sollposition calculatedthus kontaktnadeln incorrectly adjusted according to certain objective criteria are identified and a corresponding korrekturmu00f6glichkeit can be proposed, and the calibration and adjustment of the apparatus by means of a eichmusters 8 can be made by the camera 6 at least partially covered and a well defined grid level.